Vacuum Aligners High vacuum environment Aligners Vacuum Aligners High vacuum environment Aligners FEATURES High reliability of > 3 million MCBF Fiducial alignment and centering alignment - Delta Pick High vacuum compatible RS-232 / Ethernet control interface CE/S2 compliant Available for [...]
Vacuum Elevators
Hine Automation Team2020-12-17T21:56:50+00:00Vacuum Elevators Vacuum Random Access Elevators Vacuum Elevators Vacuum Random Access Elevators FEATURES High reliability of > 3 million MCBF Pay load up to 34kg Compact design including integrated controller RS-232 / Ethernet control interface CE/S2 compliant High vacuum compatible [...]
Vacuum Robotic Arms
Hine Automation Team2021-08-18T05:23:28+00:00Vacuum Robotic Arms Designed as the central handling robot for the Constellation Systems Vacuum Robotic Arms Designed as the central handling robot for the Constellation Systems FEATURES High reliability of > 3 million MCBF 2-axis or 3-axis motion control Pay load up [...]
Cassette Load Ports
Hine Automation Team2021-03-30T21:08:56+00:00Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports FEATURES Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator High reliability of > 3 million MCBF Handles wafer sizes up [...]
Atmospheric Elevators
Hine Automation Team2020-12-17T20:54:08+00:00Atmospheric ElevatorsAtmospheric Random Access Elevator Components Atmospheric Elevators Atmospheric Random Access Elevator Components FEATURES High reliability of > 3 million MCBF Pay load up to 34kg Compact design including integrated controller RS-232 / Ethernet control interface CE/S2 compliant Class 1 cleanroom [...]
Atmospheric Vacuum Robotic Arms
Hine Automation Team2021-08-18T05:02:37+00:00Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications FEATURES High reliability of > 10 million MCBF 3-axis motion control Pay load up to 0.5kg [...]
Vacuum Transfer Systems Integrated
Hine Automation Team2022-03-03T13:37:34+00:00Vacuum Transfer Integrated Systems
Vacuum Load Lock Chambers
Hine Automation Team2022-03-03T13:41:40+00:00Wafer Handling Load Locks Standard Load Locks Vacuum Load Lock Chambers Single Substrate Vacuum Transfer Systems FEATURES Handles wafer sizes up to 450mm High vacuum compatibility End effector for SEMI Standard and custom substrates CE compliant OPTIONS Vertical [...]
