Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports FEATURES Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator High reliability of > 3 million MCBF Handles wafer sizes up [...]

Atmospheric ElevatorsAtmospheric Random Access Elevator Components Atmospheric Elevators Atmospheric Random Access Elevator Components FEATURES High reliability of > 3 million MCBF Pay load up to 34kg Compact design including integrated controller RS-232 / Ethernet control interface CE/S2 compliant Class 1 cleanroom [...]

Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications FEATURES High reliability of > 10 million MCBF 3-axis motion control Pay load up to 0.5kg [...]