Vacuum Elevators

Vacuum Random Access Elevators

Vacuum Elevators

Vacuum Random Access Elevators

FEATURES

High reliability of > 3 million MCBF
Pay load up to 34kg
Compact design including integrated controller
RS-232 / Ethernet control interface
CE/S2 compliant
High vacuum compatible
Class 1 cleanroom compatible
Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models

Vacuum Random Access Elevators with precise substrate indexing capabilities

With stainless steel bellows, brushless DC motor and proven design, Hine Vacuum Random Access Elevators provide precise substrate indexing capabilities within high vacuum environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

Brochure

† Head plates for SEMI standard wafer sizes up to 200mm available.
* Custom substrate sizes available upon request.
* Higher payloads available upon request
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

	HA-50V	Both	HA-51V
Wafer Sizes		User Defined†
Pay Load		34kg*
Mounting Configuration		Bottom
Axes of Motion		Z
Weight	27kg		33kg
Vacuum performance Base operating pressure Leak Rate		<5.00E-09 Torr 1.00E-09 scc He/sec
Input Power		24 VDC at 2.5 Amps
Maximum Temperature		100⁰C
Exposed Materials		Stainless Steel 300 and 400 Series
Control Interface		RS-232 / Ethernet
MCBF		>3.00E+06
SEMI S2		Compliant
CE		Compliant
Repeatability Z		0.05mm‡
Vertical Stroke	185mm		305mm