Vacuum and Atmospheric Cassette Load Ports

Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum and Atmospheric Cassette to Cassette Load Ports (CLP & ALP) can be customized to adapt to a Customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum & Atmospheric Elevators with material indexing and positional sensing capabilities.

The Vacuum Mini Load Port (MLP) was designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for the Constellation family of cluster systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required and includes a self-centering design for the cassette and wafer eliminating the need for a positional alignment device.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system our Load Ports function as an intelligent material handling sub system.