Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

FEATURES

High reliability of > 3 million MCBF
2-axis or 3-axis motion control
Pay load up to 4.5kg
Standard and custom size arm segments
Standard and custom end effectors (single or dual)
Compact design including integrated controller
RS-232 / Ethernet control interface
CE/S2 compliant
HA-5.0V is the best replacement available for the Hine Design 4.5V
High vacuum compatible
Class 1 cleanroom compatible

Vacuum Robotic Arms Components

Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer systems. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.

Brochure

† Hine Automation offers end effector for SEMI standard sizes up to 300mm.
* Other sizes are available upon request.
* Payload depends on end effector. Higher payloads available upon request
‡ Measured as three standard deviations (3σ

PRODUCT SPECIFICATIONS

	HA-3.2	Both	HA-5.0
Wafer Sizes		300mm†
Maximum Payload		4.5kg*
Mounting configuration		Top
Axes of Motion	R, θ		R, θ, Z
Weight	30kg*		35kg*
Vacuum performance Base operating pressure Leak Rate		1x10-7 Torr 1x10-9 scc He/sec
Input Power		24V DC at 10.0 Amps
Maximum Temperature		100⁰C
Exposed Materials		6061-T6 Aluminum, Stainless Steel 300 and 400 Series, Viton
Control Interface		RS-232 / Ethernet
MCBF		>1x106
SEMI S2		Compliant
CE
Repeatability‡ R θ Z		(3σ) 0.05mm 0.01⁰ 0.05mm
Vertical Stroke	NA		35mm