Integrated Wafer Handling Systems

Vacuum Systems

Vacuum Transfer Systems Integrated

Cassette-to-Cassette Vacuum Transfer Systems

FEATURES

Hine Robotics: HA-5.0 Robotic Arm & HA-50V Vacuum Elevator
High reliability of > 3 million MCBF
Handles wafer sizes up to 200mm
Sophisticated automation features including wafer mapping, wafer cross-slot detection
Safety interlocks
High vacuum compatibility
CE/S2 compliant
RS-232 / Ethernet control interface

OPTIONS

Optical aligner
SEMI standard and custom end effectors
Dual/Single end effector
25 or 50 wafer cassettes

Cassette-to-Cassette Vacuum Transfer Systems

As Cassette-To-Cassette Vacuum Transfer Systems, the Constellation Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

Brochure

† SEMI standard sizes up to 200mm. Other sizes are available upon request.
* Custom wafer cassettes upon request.
◊ CLP Slit Valve and Isolation Plumbing come standard with each cassette load port.
‡ Optional CLP Slit Valve and Isolation Plumbing available.

PRODUCT SPECIFICATIONS

	HA-200	HA-400	HA-500	HA-600	HA-800
Wafer Sizes			≤200mm†
Sides	4	4	5	6	8
Cassette Load Lock	1	1	2	2	2
Transfer Height			1100mm
High Vacuum Package			Available
Wafer per Cassette			25*
Vacuum performance Base operating pressure Leak rate			<5.00E-07 Torr 5.00E-09 scc He/sec
Input Power			208 VAC 20A 1Ø
Electrical Integration			Yes
Maximum Temperature			100⁰C
MCBF			>3.00E+06
MTTR			<2 hours
Materials exposed			6061-T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass
Interface	200mm MESC‡		200mm MESC◊
Control Interface			RS-232 / Ethernet
SEMI S2			Compliant
CE			Compliant